JPH02724U - - Google Patents
Info
- Publication number
- JPH02724U JPH02724U JP7724388U JP7724388U JPH02724U JP H02724 U JPH02724 U JP H02724U JP 7724388 U JP7724388 U JP 7724388U JP 7724388 U JP7724388 U JP 7724388U JP H02724 U JPH02724 U JP H02724U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- pipe
- substrate
- window
- discharging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7724388U JPH02724U (en]) | 1988-06-13 | 1988-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7724388U JPH02724U (en]) | 1988-06-13 | 1988-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02724U true JPH02724U (en]) | 1990-01-05 |
Family
ID=31302240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7724388U Pending JPH02724U (en]) | 1988-06-13 | 1988-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02724U (en]) |
-
1988
- 1988-06-13 JP JP7724388U patent/JPH02724U/ja active Pending